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Together with its industrial partners, the Fraunhofer Institute for Integrated Systems
and Device Technology (IISB) is developing
new equipment and processes for semiconductor manufacturing, as well as simulation
tools to characterize the process steps involved in modern
microelectronics manufacturing. As a center of competence for power electronics,
IISB develops power electronic devices and systems - from discrete
diodes up to complex prototypes for switch-mode power supplies, drives etc.
In the field of Technology
Simulation, powerful simulation programs are developed to optimize
individual processes and process sequences. We provide simulation support to semiconductor
companies and others, e.g. for device development and optimization.
In the field of Semiconductor Manufacturing
Equipment and Methods, we support companies in the development
and improvement of equipment, materials and processes, e.g. through the
integration of in-situ measurement technology or through analytical techniques that allow
minimization of contamination.
New engineering processes and manufacturing methods for sub-100-nm
technology and for modern power components are developed by the Technology department.
This includes among others research and development on nanostructures, new concepts for memory cells, and new
materials for gate dielectrics.
Together with its industrial partners, the department
of Crystal Growth
develops and optimizes equipment and processes for growing of crystals to be
used in microelectronics and microlithography. Further focal fields of activity are
the development and application of simulation programs for
modeling high-temperature equipment and processes.
In the Power Electronic Systems department,
leading edge power electronic systems
and demonstrators are developed in close cooperation with industrial partners.
The Institute employs a full-time staff of about 150. The director of the institute, Prof.
Lothar Frey, is, at the same time, holder of the Chair of
Electron Devices of the University of Erlangen-Nuernberg.
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