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Together with its industrial partners, the Fraunhofer Institute for Integrated Systems and Device Technology (IISB) is developing new equipment and processes for semiconductor manufacturing, as well as simulation tools to characterize the process steps involved in modern microelectronics manufacturing. As a center of competence for power electronics, IISB develops power electronic devices and systems - from discrete diodes up to complex prototypes for switch-mode power supplies, drives etc.

In the field of Technology Simulation, powerful simulation programs are developed to optimize individual processes and process sequences. We provide simulation support to semiconductor companies and others, e.g. for device development and optimization.

In the field of Semiconductor Manufacturing Equipment and Methods, we support companies in the development and improvement of equipment, materials and processes, e.g. through the integration of in-situ measurement technology or through analytical techniques that allow minimization of contamination.

New engineering processes and manufacturing methods for sub-100-nm technology and for modern power components are developed by the Technology department. This includes among others research and development on nanostructures, new concepts for memory cells, and new materials for gate dielectrics.

Together with its industrial partners, the department of Crystal Growth develops and optimizes equipment and processes for growing of crystals to be used in microelectronics and microlithography. Further focal fields of activity are the development and application of simulation programs for modeling high-temperature equipment and processes.

In the Power Electronic Systems department, leading edge power electronic systems and demonstrators are developed in close cooperation with industrial partners.

The Institute employs a full-time staff of about 150. The director of the institute, Prof. Lothar Frey, is, at the same time, holder of the Chair of Electron Devices of the University of Erlangen-Nuernberg.




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