Fraunhofer IISB Profile Research Fields and Contacts Equipment Events Address and Access Fraunhofer-Gesellschaft

Welcome to the Fraunhofer Institute for Integrated Systems and Device Technology (IISB) in Erlangen. Research fields: Semiconductor manufacturing: equipment, materials, processes, simulation; power electronics; devices; crystal growth: equipment and process development, simulation, measuring techniques Member of the Fraunhofer Alliances Microelectronics, Nanotechnology and Energy IISB Publications IISB Press Releases User Groups (in German) Chair of Electron Devices, FAU Erlangen-Nürnberg   Part of an RTP module for rapid deposition on wafers   Linking Policy   © 2005 Fraunhofer-Gesellschaft   Data Protection