We work on the development of high-performance simulation tools for cost and time efficient technology and device development and optimization. Apart from the implementation of software, our activities comprise experimental investigations for designing advanced physical models. We work on the development of models for process steps such as ion implantation, diffusion, oxidation, lithography, etching and layer deposition. Furthermore, we offer you support for the optimization of technological processes and equipment through the use of process, device, and equipment simulation. Our work is carried out in close cooperation with leading semiconductor manufacturers, software houses, and research institutions.

Working groups and projects

Brochure about technology simulation department

Publications

Development and Research Lithography Simulator Dr.LiTHO

Material from Annual Conference 2006 - Technology Simulation

Contact:
Dr. Jürgen Lorenz
Tel.: +49 9131 / 761-210
Fax: +49 9131 / 761-212

 

The department supports industrial companies in developing and upgrading new manufacturing equipment, materials, and the relevant processes. Our activities include the development and optimization of devices, components, and materials, process automation and control, contamination tests of equipment and materials, development of in situ and on-line measurement and control methods, as well as equipment prequalification.

Working groups

IMPROVE - Implementing manufacturing science solutions to increase equipment productivity and fab performance

ANNA - Analytical Network for Nanotech

SEA-NET: Semiconductor Equipment Assessment for NanoElectronic Technologies

Contact:
Prof. Dr. Lothar Pfitzner
Tel.: +49 9131 / 761-110
Fax: +49 9131 / 761-112
pfitzner@iisb.fraunhofer.de

 

We are engaged in the development of novel process steps and methods for VLSI and ULSI technologies. Our activities cover among others surface and thin film technologies (e.g. dielectric layers) and ion implantation (standardized and special implantation). A further field of activity is contamination and trace analysis, as well as the modification and repair of ICs. We develop novel power devices (e.g. special trench gate technologies for lateral DMOS and IGBT) and work in the field of ASIC development, especially regarding smart power (e.g. integrated DC/DC converters).

Working groups

Flyer "Solutions & Services on Nano and Micro Scale"

Brochure about technology department


Contact:
Dr. Anton Bauer
Tel.: +49 9131 / 761-308
Fax: +49 9131 / 761-360

 

We are engaged in circuit and system design all fields of power electronics with the main emphases on industrial and automotive electronics. We support companies in application oriented front-end development, circuit design and prototype engineering. Our special interest is on mechatronic system integration - i.e. the integration of power electronics, micro-electronics, remote sensing, and mechanics. Further topics are electrical and thermal simulation, system optimization, innovative solutions for energy saving and efficiency optimization, measuring techniques for power electronics, device characterization, and device modeling.

Working groups and projects

Publications

The Department Crystal Growth provides various R&D services which are based on its know-how in crystal growth and the profound experiences of its co-workers in mechanical engineering, process analysis, and computer simulation. R&D services are especially the development and optimization of equipment and processes for the growth of crystals to be used in microelectronics and micro-lithography. The department is provided with user friendly simulation programs, which are especially suitable for the global heat and mass transport calculation in high temperature equipment with complex geometries. These computer codes are continuously further developed in close co-operation with industry with regard to new or improved physical models, to an easier way to use the programs and to more efficient algorithms. Furthermore, profound experimental experience exists in the development and application of process analysis, especially for the determination of the heat and mass transport in crystal growth equipment. In addition numerous methods for electrical and optical characterization of crystals are available due to a close collaboration to the Department of Electronic Materials.

Overview

Research

Services

Publications

Open Positions

Press Releases

Events

Downloads

Contact:
Dr. Jochen Friedrich
Tel.: +49 9131 / 761-269
Fax: +49 9131 / 761-280